Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
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==Dose information== | ==Dose information== | ||
[[Image:eLINE-Areas.png|800x800px|right|thumb|Base doses for exposure must be defined in the Pattern Parameter Calculation window.]] | |||
The eLINE tool operates with four different dose types | The eLINE tool operates with four different dose types | ||
*Area dose [µC/cm2], | *Area dose [µC/cm2], | ||