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===Process information for the Raith eLINE Plus system===
===Process information for the Raith eLINE Plus system===
The system was installed in the cleanroom in May 2022. As we get more familiar with the tool this page will be populated with relevant process information.  
The system was installed in the cleanroom in May 2022. As we get more familiar with the tool this page will be populated with relevant process information.
 
[[Image:eLINE-Areas.png|800x800px|right|thumb|Base doses for exposure must be defined in the Pattern Parameter Calculation window.]]


==Dose information==  
==Dose information==  
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/EBeamLithography/eLINE"