Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions

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Created page with "<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px ===Process information for the Raith eLINE Plus system=== Table..."
 
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{| border="2" cellspacing="1" cellpadding="1" align="center"  
{| border="2" cellspacing="1" cellpadding="1" align="center"  
! style="background:silver; color:black" | Dose [µC/cm2]]
! style="background:silver; color:black" | Dose µC/cm2]
! style="background:silver; color:black" | AR-P 6200.09 (180 nm)]
! style="background:silver; color:black" | AR-P 6200.09 (180 nm)]
! style="background:silver; color:black" | PMMA 950k]
! style="background:silver; color:black" | PMMA 950k]
! style="background:silver; color:black" | AR-N 8200.xx]
! style="background:silver; color:black" | AR-N 8200.xx]
|- valign="top"
|- valign="top"
! style="background:lightgrey; color:black" | Manufactured
! style="background:lightgrey; color:black" | 10 kV
| style="background:lightgrey; color:black" | 2010
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 2010
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 2010
| style="background:lightgrey; color:black" |  
|- valign="top"
|- valign="top"
! style="background:Whitesmoke; color:black" | Serial
! style="background:Whitesmoke; color:black" | 20 kV
! style="background:WhiteSmoke; color:black" | MP0636
! style="background:WhiteSmoke; color:black" |  
| style="background:WhiteSmoke; color:black"| MP0641
| style="background:WhiteSmoke; color:black"|  
| style="background:WhiteSmoke; color:black"| CP0170
| style="background:WhiteSmoke; color:black"|  
| style="background:WhiteSmoke; color:black"| CP0171
|- valign="top"
|- valign="top"
! style="background:lightgrey; color:black" | Electrode size
! style="background:lightgrey; color:black" | 30 kV
| style="background:lightgrey; color:black" | 4"
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 6"
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 6"
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 6"
|- valign="top"
|- valign="top"
! style="background:Whitesmoke; color:black" | Hardware options
! style="background:Whitesmoke; color:black" | Hardware options

Revision as of 11:33, 9 June 2022

THIS PAGE IS UNDER CONSTRUCTION

Process information for the Raith eLINE Plus system

Table of dose to clear

Dose µC/cm2] AR-P 6200.09 (180 nm)] PMMA 950k] AR-N 8200.xx]
10 kV
20 kV
30 kV
Hardware options ?
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