Specific Process Knowledge/Thin film deposition/Deposition of Gold: Difference between revisions
| Line 275: | Line 275: | ||
! QC Recipe: | ! QC Recipe: | ||
! Standard recipes/TiAu | ! Standard recipes/TiAu or Cr/Au | ||
|- | |- | ||
|Deposition rate | |Deposition rate | ||
|10 Å/s | |10 Å/s (change to 2 Å/s from October 2022 as it gives less particles) | ||
|- | |- | ||
|Thickness | |Thickness | ||
| Line 305: | Line 305: | ||
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Thickness is measured in 5 points with a stylus profiler. <br> | Thickness is measured in 5 points with a stylus profiler. <br> | ||
Additionally we examine the newly deposited films for particles using the particle scanner (if available, otherwise we use the Jenatech microscope in darkfield mode) and we monitor the sheet resistance of the Ti/Au films. | Additionally we examine the newly deposited films for particles using the particle scanner (if available, otherwise we use the Jenatech microscope in darkfield mode) and we monitor the sheet resistance of the Ti/Au or Cr/Au films. | ||
|} | |} | ||