Specific Process Knowledge/Thin film deposition/Deposition of Gold: Difference between revisions

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-Thickness is measured in 5 points with one of the Dektak instruments. <br>
+Thickness is measured in 5 points with a stylus profiler. <br>
 Additionally we examine the newly deposited films for particles using the particle scanner (if available, otherwise we use the Jenatech microscope in darkfield mode) and we monitor the sheet resistance of the Ti/Au films.
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-Thicknesses are measured in 5 points with one of the Dektak instruments.
+Thickness is measured in 5 points with a stylus profiler.
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