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Specific Process Knowledge/Thin film deposition/Deposition of Gold: Difference between revisions

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moved qc info to correct place
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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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! QC Recipe:
! QC Recipe:
! Ti / Au
! Standard recipes/TiAu
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|Deposition rate
|Deposition rate
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Thicknesses are measured in 5 points with one of the Dektak instruments. <br>
Thickness is measured in 5 points with one of the Dektak instruments. <br>
Additionally we examine the newly deposited films for particles using the particle scanner (if available, otherwise we use the Jenatech microscope in darkfield mode) and we monitor the sheet resistance of the Ti/Au films.
Additionally we examine the newly deposited films for particles using the particle scanner (if available, otherwise we use the Jenatech microscope in darkfield mode) and we monitor the sheet resistance of the Ti/Au films.
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! QC Recipe:
! QC Recipe:
! Ti / Au
! Process 13
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|Deposition rate
|Deposition rate
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|Thickness
|Thickness
|100 Å / 900 Å
|10 nm / 90 nm
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|Pressure
|Pressure
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|Measured average thickness (Å)
|Measured average thickness (Å)
|900-1100 Å
|± 10 %
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|Lowest accepted deposition rate (Å/s)
|Lowest accepted deposition rate (Å/s)
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