Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
moved info abt particulates and detailed info about e-beam evap to subpages |
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*[[/Good to know about the Temescal|Good to know]] about the thickness measurement accuracy, deposition rate measurement, and checking that the process is proceeding as it should. | *[[/Good to know about the Temescal|Good to know]] about the thickness measurement accuracy, deposition rate measurement, and checking that the process is proceeding as it should. | ||
*[[/Particulates in Temescal Au films|Particulates in Temescal | *[[/Particulates in Temescal Au films|Particulates in Temescal films]]. Information about optimizing film quality including how to minimize the number of particulates in Au films in the Temescal. | ||
====Materials for e-beam evaporation==== | ====Materials for e-beam evaporation==== | ||