Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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|ItemName= Etch of chromium and silicon nitrides | |ItemName= Etch of chromium and silicon nitrides | ||
|ItemConfiguration= Recipes for etching chromium and silicon nitrides have been developed. | |ItemConfiguration= Recipes for etching chromium and silicon nitrides have been developed. | ||
|ItemComment= | |ItemComment= Etching the two materials is only allowed for processes in combination with other Pegasus 2 specific recipes such as the CORE recipe. '''Always consult with Nanolab staff.''' | ||
}} | }} | ||
{{Template:Peg2configcontent1 | {{Template:Peg2configcontent1 | ||