Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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!AZ 5214E<br><span style="color:green">New Japanese version</span> | !AZ 5214E<br><span style="color:green">New Japanese version</span> | ||
| <br>jehem | | 2021-08-20<br>jehem | ||
| 1.5 µm | | 1.5 µm | ||
| 375 | | 375 | ||
| Optical | | Optical | ||
| Fast | | Fast | ||
| | | 70 mJ/cm<sup>2</sup> | ||
| | | -4 | ||
| | | 1 µm | ||
| Dev: SP60s | | Dev: SP60s | ||
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|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!AZ 5214E image reversal<br><span style="color:green">New Japanese version</span> | !AZ 5214E image reversal<br><span style="color:green">New Japanese version</span> | ||
| <br>jehem | | 2021-11-25<br>jehem | ||
| 2.2 µm | | 2.2 µm | ||
| 375 | | 375 | ||
| Optical | | Optical | ||
| Fast | | Fast | ||
| | | 16 mJ/cm<sup>2</sup> | ||
| | | -4 | ||
| | | 1.75 µm | ||
| Reversal bake: 60s@110°C, Flood exposure: 500mJ/cm<sup>2</sup>, Dev: SP60s | | Reversal bake: 60s@110°C, Flood exposure: 500mJ/cm<sup>2</sup>, Dev: SP60s | ||
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!AZ MiR 701<br><span style="color:green">New PFOA free version</span> | !AZ MiR 701<br><span style="color:green">New PFOA free version</span> | ||
| <br>jehem | | 2021-08-20<br>jehem | ||
| 1.5 µm | | 1.5 µm | ||
| 375 | | 375 | ||
| Optical | | Optical | ||
| Fast | | Fast | ||
| | | 200 mJ/cm<sup>2</sup> | ||
| | | -6 | ||
| | | 1 µm<br>Tested using dehydration reducing measures | ||
| PEB: 60s@110°C, Dev: SP60s | | PEB: 60s@110°C, Dev: SP60s | ||
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!AZ 4562<br><span style="color:green">New Japanese version</span> | !AZ 4562<br><span style="color:green">New Japanese version</span> | ||
| <br>jehem | | 2021-12-08<br>jehem | ||
| 10 µm | | 10 µm | ||
| 375 | | 375 | ||
| Optical | | Optical | ||
| Fast | | Fast | ||
| | | 750 mJ/cm<sup>2</sup> | ||
| | | 0 | ||
| | | ≤5 µm | ||
| Priming: HMDS<BR>Rehydration after SB: 1 hour (may not be necessary)<br>Exposure: Multiple exposures with pauses, 5 x (10 s exposure + 10 s pause)<br>Degassing after exposure: 1 hour (may not be necessary)<br>Development: Multiple puddles, 5 x 60 s | | Priming: HMDS<BR>Rehydration after SB: 1 hour (may not be necessary)<br>Exposure: Multiple exposures with pauses, 5 x (10 s exposure + 10 s pause)<br>Degassing after exposure: 1 hour (may not be necessary)<br>Development: Multiple puddles, 5 x 60 s | ||
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