Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
| Line 44: | Line 44: | ||
| 80 mJ/cm<sup>2</sup> | | 80 mJ/cm<sup>2</sup> | ||
| -4 | | -4 | ||
| 2 µm | | 2 µm | ||
| Dev: SP60s | | Dev: SP60s | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
| | | 2021-08-19<br>jehem | ||
| 1.5 µm | | 1.5 µm | ||
| Quality | | Quality | ||
| Line 84: | Line 84: | ||
| 300 mJ/cm<sup>2</sup> | | 300 mJ/cm<sup>2</sup> | ||
| 0 | | 0 | ||
| 2 µm (due to stitching) | | 2 µm (due to stitching)<br>Results poor due to resist dehydration? | ||
| PEB: 60s@110°C, Dev: SP60s | | PEB: 60s@110°C, Dev: SP60s | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
| Line 92: | Line 92: | ||
| 225 mJ/cm<sup>2</sup> | | 225 mJ/cm<sup>2</sup> | ||
| -4 | | -4 | ||
| 1.25 µm | | 1.25 µm<br>Tested using dehydration reducing measures | ||
| PEB: 60s@110°C, Dev: SP60s | | PEB: 60s@110°C, Dev: SP60s | ||
|- | |- | ||
| Line 99: | Line 99: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!rowspan="2"| AZ nLOF 2020 | !rowspan="2"| AZ nLOF 2020 | ||
| | | 2020-02-01<br>jehem | ||
| 2.0 µm | | 2.0 µm | ||
| Fast | | Fast | ||
| 300 mJ/cm<sup>2</sup> | | 300 mJ/cm<sup>2</sup> | ||
| 0 | | 0 | ||
| 2 µm (due to stitching) | | 2 µm (due to stitching) | ||
| PEB: 60s@110°C, Dev: SP60s | | PEB: 60s@110°C, Dev: SP60s | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
| | | 2020-03-01<br>taran | ||
| 2.0 µm | | 2.0 µm | ||
| Quality | | Quality | ||
| 180-200 mJ/cm<sup>2</sup> | | 180-200 mJ/cm<sup>2</sup> | ||
| 0 | | 0 | ||
| 1 µm | | 1 µm | ||
| PEB: 60s@110°C, Dev: SP60s | | PEB: 60s@110°C, Dev: SP60s | ||