Specific Process Knowledge/Characterization/Profiler: Difference between revisions
→Stylus Profiler (Tencor P17): added Acceptance test results |
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Line scan X: 20 µm to 200 mm in a single scan. No stitching. | Line scan X: 20 µm to 200 mm in a single scan. No stitching. | ||
Map scan XY: any rectangle that can be inscribed in a 200 mm circle. Note limited resolution (max. 4 million points). | Map scan XY: In principle any rectangle that can be inscribed in a 200 mm circle. Note limited resolution (max. 4 million points) and slow scanning. In practice to get good resolution scan a very small area (e.g., 100 x 1000 µm) | ||
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|style="background:LightGrey; color:black"|Scan range Z | |style="background:LightGrey; color:black"|Scan range Z | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
50 nm to 900 µm | 50 nm to 900 µm. It is possible to measure smaller steps but not recommended as the results may not be accurate. | ||
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|style="background:LightGrey; color:black"|Resolution X Y | |style="background:LightGrey; color:black"|Resolution X Y | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
Down to 0.025 µm | Down to 0.025 µm in theory, but the tip radius is 2 µm, so the meaningful resolution is at the same order of magnitude | ||
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|style="background:LightGrey; color:black"|Resolution Z | |style="background:LightGrey; color:black"|Resolution Z | ||