Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
| Line 88: | Line 88: | ||
|AR 300-73 | |AR 300-73 | ||
| a = ?, b = ? | | a = ?, b = ? | ||
| | |85C, 90 sec | ||
|} | |} | ||
| Line 88: | Line 88: | ||
|AR 300-73 | |AR 300-73 | ||
| a = ?, b = ? | | a = ?, b = ? | ||
| | |85C, 90 sec | ||
|} | |} | ||