Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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=SDF and JDF file preparation= | =SDF and JDF file preparation= | ||
In order to execute the pattern writing a significant number of parameters must be defined for the job. These are defined in two text files; the Schedule Definition File (SDF) and Jobdeck Definition File (JDF). The system has a close to zero tolerance on syntax error from the user and thus these files should be prepared carefully, usually by using templates and correcting the parameters to suit your exposure. We encourage users to download and use SuperEdi for editing SDJ/JDF files. As the JEOL 9500 is operated from a Unix computer you must save your SDF/files in Unix format, available as a option from the “Save As” menu in SuperEdi. | In order to execute the pattern writing a significant number of parameters must be defined for the job. These are defined in two text files; the Schedule Definition File (SDF) and Jobdeck Definition File (JDF). The system has a close to zero tolerance on syntax error from the user and thus these files should be prepared carefully, usually by using templates and correcting the parameters to suit your exposure. We encourage users to download and use SuperEdi for editing SDJ/JDF files. As the JEOL 9500 is operated from a Unix computer you must save your SDF/JDF files in Unix format, available as a option from the “Save As” menu in SuperEdi. | ||
For our example job we will use the following files. | For our example job we will use the following files. | ||