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Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,224 edits
Line 50: Line 50:
|'''Remover'''
|'''Remover'''
|'''Polynomial'''
|'''Polynomial'''
|'''Soft bake'''
|-
|-


Line 63: Line 64:
|AR-600-71, 1165 Remover
|AR-600-71, 1165 Remover
| a = 7252.2, b = -0.454
| a = 7252.2, b = -0.454
|180C, 3-10 min


|-
|-
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