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Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions

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|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
|'''[[Specific_Process_Knowledge/Lithography/ARN8200|AR-N 8200]]'''
|'''[[Specific_Process_Knowledge/Lithography/ARN8200|Medusa 82 / AR-N 8200.06]]'''
|Negative
|Negative
|[http://www.allresist.com AllResist]
|[https://www.allresist.com/wp-content/uploads/sites/2/2020/03/SXAR-N8200-1_english_Allresist_product_information.pdf Medusa 82 info]
|[[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spin_Coaters|Spin Coater: Labspin 02/03]]
|[[Specific_Process_Knowledge/Lithography/Coaters#Manual_Spin_Coaters|Spin Coater: Labspin 02/03]]
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