Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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===JEOL 9500: My First E-Beam Lithography Process=== | ===JEOL 9500: My First E-Beam Lithography Process=== | ||
This page is a step by step guide to help new users through their '''first exposure''' on the JEOL 9500 system, (insert link to same page for Raith eLine Plus). In this guide we will set up an exposure job as an example. We will set it up as a dose test and hence keep it at a fairly low complexity level. The JEOL 9500 system has a | This page is a step by step guide to help new users through their '''first exposure''' on the JEOL 9500 system, (insert link to same page for Raith eLine Plus). In this guide we will set up an exposure job as an example. We will set it up as a dose test and hence keep it at a fairly low complexity level. The JEOL 9500 system has a steep learning curve and we encourage all users to keep the complexity level of their first exposure similar to the job in this guide. | ||
The job set up in this guide will go through the following steps | The job set up in this guide will go through the following steps | ||