Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions

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	===My First E-Beam Lithography Process===		===My First E-Beam Lithography Process===

	This page is a step by step guide to help new users through their ''first exposure'' on the JEOL 9500 system. In this guide we will set up an exposure job as an example. We will set it up as a dose test and hence keep it at a fairly low complexity level. We encourage all users to keep the complexity level of their first exposure similar to the job in this guide.		This page is a step by step guide to help new users through their '''first exposure''' on the JEOL 9500 system. In this guide we will set up an exposure job as an example. We will set it up as a dose test and hence keep it at a fairly low complexity level. We encourage all users to keep the complexity level of their first exposure similar to the job in this guide.