Specific Process Knowledge/Lithography/ARN8200: Difference between revisions
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== AR-N 8200 == | == AR-N 8200 == | ||
AR-N 8200 is a negative E-beam resist from Allresist, it is also known as "Medusa 82". A product presentation from Allresist is available here [https://www.allresist.com/wp-content/uploads/sites/2/2020/10/Medusa82_presentation-2020.pdf | AR-N 8200 is a negative E-beam resist from Allresist, it is also known as "Medusa 82". A product presentation from Allresist is available here [https://www.allresist.com/wp-content/uploads/sites/2/2020/10/Medusa82_presentation-2020.pdf AR-N8200 presentation.] | ||
== Contrast curve == | == Contrast curve == | ||