Specific Process Knowledge/Lithography/Descum: Difference between revisions
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Ashing of AZ MiR701 resist | Ashing of AZ MiR701 resist | ||
[[image:AZMIR701_power_settings.png|right|frame|400x400px| Descum results for different power settings]] | |||
You can use different strategy planing your descum: you can change power settings or you can vary chamber pressure during descum. | You can use different strategy planing your descum: you can change power settings or you can vary chamber pressure during descum. | ||