Specific Process Knowledge/Thin film deposition: Difference between revisions
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=== Dielectrica === | |||
*[[/Deposition of Silicon Nitride|Silicon Nitride]] | |||
*[[/Deposition of Silicon Oxide|Silicon Oxide]] | |||
=== Polymers === | === Polymers === | ||
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*PMMA | *PMMA | ||
== Choose deposition equipment == | == Choose deposition equipment == | ||