Specific Process Knowledge/Etch/DryEtchProcessing/Data4dryetch: Difference between revisions
Created page with "= Source: The National Physical Laboratory - Kaye and Laby = The tables in the links below are quite extensive. If you wonder why they are useful in relation to dry etching, ..." |
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= Source: The National Physical Laboratory - Kaye and Laby = | = Source: The National Physical Laboratory - Kaye and Laby = | ||
The tables in the links below are quite extensive. If you wonder | The National Physical Laboratory tables in the links below are quite extensive. The information on melting points and boiling points for various inorganic compounds may guide you to choosing the right chemistry for your dry etch process. | ||
If you wonder how this works, then sign up for the Dry Etch TPT. You must, however, always consult with dry etch staff before you start developing new etch recipes. | |||
* [https://web.archive.org/web/20170618035832/http://www.kayelaby.npl.co.uk/chemistry/3_2/3_2.html Part 1: Aluminium - Chlorine] | * [https://web.archive.org/web/20170618035832/http://www.kayelaby.npl.co.uk/chemistry/3_2/3_2.html Part 1: Aluminium - Chlorine] | ||
* [https://web.archive.org/web/20170618035832/http://www.kayelaby.npl.co.uk/chemistry/3_2/3_2b.html Part 1: Chromium - Lithium] | |||
* [https://web.archive.org/web/20170618035832/http://www.kayelaby.npl.co.uk/chemistry/3_2/3_2c.html Part 1: Magnesium - Selenium] | |||
* [https://web.archive.org/web/20170618035832/http://www.kayelaby.npl.co.uk/chemistry/3_2/3_2d.html Part 1: Silicon - Zirconium] | |||
Latest revision as of 11:25, 25 February 2022
Source: The National Physical Laboratory - Kaye and Laby
The National Physical Laboratory tables in the links below are quite extensive. The information on melting points and boiling points for various inorganic compounds may guide you to choosing the right chemistry for your dry etch process. If you wonder how this works, then sign up for the Dry Etch TPT. You must, however, always consult with dry etch staff before you start developing new etch recipes.