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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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==20:10==
==20:10==


{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
{| border="2" cellpadding="0" cellspacing="0" style="text-align:center;"
Line 1,185: Line 1,181:
! width="50" rowspan="2"| Process Information
! width="50" rowspan="2"| Process Information
! colspan="15"| SEM images of trenches
! colspan="15"| SEM images of trenches
! rowspan="2" | Numbers
|-
|-
! 2 µm
! 2 µm
Line 1,203: Line 1,198:
! 300 µm
! 300 µm
|-
|-
| January 2013
|rowspan="2"| January 2013
| Travka05, 600 nm oxide, '''5% open'''
|rowspan="2"| Travka05, 600 nm oxide, '''5% open'''
| Process A 110 cycles or 20:10 minutes, '''C01549.01'''  
|rowspan="2"| Process A 110 cycles or 20:10 minutes, '''C01549.01'''  
| [[file:C01549.01 002mu 0129.jpg |75px|frameless ]]
| [[file:C01549.01 002mu 0129.jpg |75px|frameless ]]
| [[file:C01549.01 004-3mu 0128.jpg |75px|frameless ]]
| [[file:C01549.01 004-3mu 0128.jpg |75px|frameless ]]
Line 1,221: Line 1,216:
| [[file:C01549.01 200mu 0118.jpg |75px|frameless ]]
| [[file:C01549.01 200mu 0118.jpg |75px|frameless ]]
| [[file:C01549.01 300mu 0117.jpg |75px|frameless ]]
| [[file:C01549.01 300mu 0117.jpg |75px|frameless ]]
|
|-
|colspan="15"|
{| {{table}}
{| {{table}}
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)'''
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)'''
Line 1,254: Line 1,250:
|}
|}
|-
|-
| January 2013
|rowspan="2"| January 2013
| Travka10, 600 nm oxide, '''10% open'''
|rowspan="2"| Travka10, 600 nm oxide, '''10% open'''
| Process A 110 cycles or 20:10 minutes, '''C01549.02'''  
|rowspan="2"| Process A 110 cycles or 20:10 minutes, '''C01549.02'''  
| [[file:C01549.02 002mu 0085.jpg |75px|frameless ]]
| [[file:C01549.02 002mu 0085.jpg |75px|frameless ]]
| [[file:C01549.02 003mu 0084.jpg |75px|frameless ]]
| [[file:C01549.02 003mu 0084.jpg |75px|frameless ]]
Line 1,272: Line 1,268:
| [[file:C01549.02 200mu 0072.jpg |75px|frameless ]]
| [[file:C01549.02 200mu 0072.jpg |75px|frameless ]]
| [[file:C01549.02 300mu 0071.jpg |75px|frameless ]]
| [[file:C01549.02 300mu 0071.jpg |75px|frameless ]]
|
|-
|colspan="15"|
{| {{table}}
{| {{table}}
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)'''
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)'''
Line 1,305: Line 1,302:
|}
|}
|-
|-
| January 2013
|rowspan="2"| January 2013
| Travka20, 600 nm oxide, '''20% open'''
|rowspan="2"| Travka20, 600 nm oxide, '''20% open'''
| Process A 110 cycles or 20:10 minutes, '''C01549.03'''  
|rowspan="2"| Process A 110 cycles or 20:10 minutes, '''C01549.03'''  
| [[file:C01549.03 002mu 0087.jpg |75px|frameless ]]
| [[file:C01549.03 002mu 0087.jpg |75px|frameless ]]
| [[file:C01549.03 003mu 0088.jpg |75px|frameless ]]
| [[file:C01549.03 003mu 0088.jpg |75px|frameless ]]
Line 1,323: Line 1,320:
| [[file:C01549.03 200mu 0100.jpg |75px|frameless ]]
| [[file:C01549.03 200mu 0100.jpg |75px|frameless ]]
| [[file:C01549.03 300mu 0101.jpg |75px|frameless ]]
| [[file:C01549.03 300mu 0101.jpg |75px|frameless ]]
|
|-
|colspan="15"|
{| {{table}}
{| {{table}}
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)'''
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)'''
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