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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
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| January 2013
|rowspan="2"| January 2013
| Travka10, AZ 5214, '''10% open'''
|rowspan="2"| Travka10, AZ 5214, '''10% open'''
| Process A 55 cycles or 10:05 minutes, '''C01548.02'''
|rowspan="2"| Process A 55 cycles or 10:05 minutes, '''C01548.02'''
|[[file:C01548.02 2mu  0001.jpg |75px|frameless ]]
|[[file:C01548.02 2mu  0001.jpg |75px|frameless ]]
|[[file:C01548.02 3mu  0002.jpg |75px|frameless ]]
|[[file:C01548.02 3mu  0002.jpg |75px|frameless ]]
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|[[file:C01548.02 200mu 0136.jpg |75px|frameless ]]
|[[file:C01548.02 200mu 0136.jpg |75px|frameless ]]
|[[file:C01548.02 300mu 0138.jpg |75px|frameless ]]
|[[file:C01548.02 300mu 0138.jpg |75px|frameless ]]
|
|-
|colspan="15"|
{| {{table}}
{| {{table}}
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)'''
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)'''
Line 1,013: Line 1,014:
|}  
|}  
|-
|-
| January 2013
|rowspan="2"| January 2013
| Travka20, AZ 5214, '''20% open'''
|rowspan="2"| Travka20, AZ 5214, '''20% open'''
| Process A 55 cycles or 10:05 minutes, '''C01548.03'''
|rowspan="2"| Process A 55 cycles or 10:05 minutes, '''C01548.03'''
| [[file:C01548.03 002mu0041.jpg |75px|frameless ]]
| [[file:C01548.03 002mu0041.jpg |75px|frameless ]]
| [[file:C01548.03 003mu0040.jpg |75px|frameless ]]
| [[file:C01548.03 003mu0040.jpg |75px|frameless ]]
Line 1,031: Line 1,032:
| [[file:C01548.03 200mu0028.jpg |75px|frameless ]]
| [[file:C01548.03 200mu0028.jpg |75px|frameless ]]
| [[file:C01548.03 300mu0027.jpg |75px|frameless ]]
| [[file:C01548.03 300mu0027.jpg |75px|frameless ]]
|
|-
|colspan="15"|
{| {{table}}
{| {{table}}
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)'''
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)'''
Line 1,064: Line 1,066:
|}
|}
|-
|-
| January 2013
|rowspan="2"| January 2013
| Travka35, AZ 5214, '''35% open'''
|rowspan="2"| Travka35, AZ 5214, '''35% open'''
| Process A 55 cycles or 10:05 minutes, '''C01548.04'''
|rowspan="2"| Process A 55 cycles or 10:05 minutes, '''C01548.04'''
| [[file:C01548.04 002mu 0042.jpg |75px|frameless ]]
| [[file:C01548.04 002mu 0042.jpg |75px|frameless ]]
| [[file:C01548.04 003mu 0043.jpg |75px|frameless ]]
| [[file:C01548.04 003mu 0043.jpg |75px|frameless ]]
Line 1,082: Line 1,084:
| [[file:C01548.04 200mu 0056.jpg |75px|frameless ]]
| [[file:C01548.04 200mu 0056.jpg |75px|frameless ]]
| [[file:C01548.04 300mu 0057.jpg |75px|frameless ]]
| [[file:C01548.04 300mu 0057.jpg |75px|frameless ]]
|
|-
|colspan="15"|
{| {{table}}
{| {{table}}
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)'''
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)'''
Line 1,115: Line 1,118:
|}
|}
|-
|-
| January 2013
|rowspan="2"| January 2013
| Travka50, AZ 5214, '''50% open'''
|rowspan="2"| Travka50, AZ 5214, '''50% open'''
| Process A 55 cycles or 10:05 minutes, '''C01548.05'''
|rowspan="2"| Process A 55 cycles or 10:05 minutes, '''C01548.05'''
|
|
| [[file:C01548.05 003mu 0058.jpg |75px|frameless ]]
| [[file:C01548.05 003mu 0058.jpg |75px|frameless ]]
Line 1,133: Line 1,136:
| [[file:C01548.05 200mu 0069.jpg |75px|frameless ]]
| [[file:C01548.05 200mu 0069.jpg |75px|frameless ]]
| [[file:C01548.05 300mu 0070.jpg |75px|frameless ]]
| [[file:C01548.05 300mu 0070.jpg |75px|frameless ]]
|
|-
|colspan="15"|
{| {{table}}
{| {{table}}
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)'''
| align="center" style="background:#f0f0f0;"|'''Trench width (µm)'''
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