Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM0.2kW: Difference between revisions
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|%PlatenDepLoad=38.2 |%PlatenDepTune=53.8 |%PlatenEtchLoad=38.2 |%PlatenEtchTune=53.8 | |%PlatenDepLoad=38.2 |%PlatenDepTune=53.8 |%PlatenEtchLoad=38.2 |%PlatenEtchTune=53.8 | ||
|Temperature=0 | |Temperature=0 | ||
|Link2RecipeRun=[[ | |Link2RecipeRun=[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM0.2kW | '''1''']] | ||
}} | }} | ||
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