Specific Process Knowledge/Wafer and sample drying/Critical Point Dryer: Difference between revisions
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Dried in air: most cantilevers are bended. | Dried in air: most cantilevers are bended. | ||
[[Image:SiN cantilever dried CPD.jpg|350x350px|left|thumb|Dried with Critical Point Dryer. ]] | |||
Dried with Critical Point Dryer. The cantilevers are free hanging, and have not bended. The dimensions of the cantilevers are 100 x 710 µm, and the thickness is about 0.5 µm. | Dried with Critical Point Dryer. The cantilevers are free hanging, and have not bended. The dimensions of the cantilevers are 100 x 710 µm, and the thickness is about 0.5 µm. | ||