Specific Process Knowledge/Characterization/Profiler: Difference between revisions

← Older edit Newer edit →

VisualWikitext

@@ Line 137: / Line 137: @@
 Line scan x: up to 200 mm in a single scan. No stitching.
 Map scan xy: any rectangle that can be inscribed in a 200 mm circle but note limited resolution (max. 4 million points)
--
+|-
 |style="background:LightGrey; color:black"|Scan range z
 |style="background:WhiteSmoke; color:black"|
@@ Line 152: / Line 152: @@
 |style="background:LightGrey; color:black"|Height accuracy z (95 % confidence)
 |style="background:WhiteSmoke; color:black"|
-~ 300 Å for the 65 kÅ range, ~ 0.17 µm for the intermediate ranges, and ~0.6 µm for the 1 mm range for well-defined steps that are easy to measure reproducibly ([[#Height measurement accuracy for the DektakXT|see below]])
+To be updated...
 |-
 |style="background:LightGrey; color:black"|Max scan depth as a function of trench width W
 |style="background:WhiteSmoke; color:black"|
-.2*(W[µm]-5µm)
+.866*(W[µm]-2µm)
 |-
@@ Line 162: / Line 162: @@
 |style="background:LightGrey; color:black"|Tip radius
 |style="background:WhiteSmoke; color:black"|
-*5 µm 45<sup>o</sup> cone
+*2 µm 60<sup>o</sup> cone
 |-
 !style="background:silver; color:black" align="left" rowspan="5" valign="top" |Substrates
 |style="background:LightGrey; color:black"|Substrate size
 |style="background:WhiteSmoke; color:black"|
-*Up to 6"
+*Up to 8"
 |-
 | style="background:LightGrey; color:black"|Substrate materials allowed
 |style="background:WhiteSmoke; color:black"|
-*In principle all materials
+*In principle all materials that do not leave residues on the chuck.
 |-
 |}