Specific Process Knowledge/Etch/DryEtchProcessing/Comparison: Difference between revisions
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| style="background:WhiteSmoke; color:black"| Etching of silicon oxides or nitrides on 4" wafers | | style="background:WhiteSmoke; color:black"| Etching of silicon oxides or nitrides on 4" wafers | ||
| style="background:WhiteSmoke; color:black"| Silicon etching of 4" wafers | | style="background:WhiteSmoke; color:black"| Silicon etching of 4" wafers | ||
| style="background:WhiteSmoke; color:black"| Research tool into silicon etching | | style="background:WhiteSmoke; color:black"| Research tool into silicon etching - only a few special recipes! | ||
| style="background:WhiteSmoke; color:black"| Silicon etching of 6" wafers on 6" wafers | | style="background:WhiteSmoke; color:black"| Silicon etching of 6" wafers on 6" wafers | ||
| style="background:WhiteSmoke; color:black"| Etching of silicon oxides or nitrides on 6" wafers | | style="background:WhiteSmoke; color:black"| Etching of silicon oxides or nitrides on 6" wafers | ||