Specific Process Knowledge/Wafer and sample drying/Critical Point Dryer: Difference between revisions

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 |style="background:LightGrey; color:black"|Process Temperature
 |style="background:WhiteSmoke; color:black"|
-*Room temperature to 500<math>\rm{^o}</math>C
+<math>\rm{^o}</math>C temperature to 45<math>\rm{^o}</math>C
 |-
 |style="background:LightGrey; color:black"|Process pressure
 |style="background:WhiteSmoke; color:black"|
-*~5<math>\cdot</math>10<sup>-4</sup>mbar - 2000mbar
+atm to (maximum) 95 atm (1400 PSI)
 |-
 |style="background:LightGrey; color:black"|Piston Force