Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions
| Line 52: | Line 52: | ||
***1200 °C: 1 min. | ***1200 °C: 1 min. | ||
Temperature ramp: | Temperature ramp: | ||
*Up to | *Up to 30 <sup>o</sup>C/min with susceptor | ||
*Up to 100 <sup>o</sup>C/min without susceptor | *Up to 100 <sup>o</sup>C/min without susceptor | ||