Specific Process Knowledge/Thin film deposition/Deposition of Niobium: Difference between revisions
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== Deposition of Nb == | == Deposition of Nb == | ||
Niobium can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the deposition equipment | Niobium can be deposited by e-beam evaporation or sputtering. In the chart below you can compare the deposition equipment. | ||
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