Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy: Difference between revisions
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==Nanoman== | ==Nanoman== | ||
[[image:Dektak8.JPG|275x275px|right|thumb|Dektak8: positioned in cleanroom 4 - glass cage no. 4]] | |||
The AFM: Nanoman is a product of Veeco Instruments. | |||
To get some product information from the vendor take a look at Veeco's homepage [http://www.veeco.com/products/details.php?cat=1&sub=1&pid=178] | |||
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===A rough overview of the performance of th eAFM: Nanoman=== | |||
{| border="2" cellspacing="0" cellpadding="10" | |||
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!style="background:silver; color:black;" align="left"|Purpose | |||
|style="background:LightGrey; color:black"|Profiler for measuring micro structures.||style="background:WhiteSmoke; color:black"| | |||
*Single point profiles | |||
*Wafer mapping | |||
*Stress measurements by measuring wafer bow | |||
*Surface roughness on a line scan | |||
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!style="background:silver; color:black" align="left"|Performance | |||
|style="background:LightGrey; color:black"|Scan range xy||style="background:WhiteSmoke; color:black"| | |||
Line scan x: 50 µm to 200 mm | |||
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|style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Scan range z | |||
|style="background:WhiteSmoke; color:black"| | |||
50 Å to 262 µm | |||
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|style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Resolution xy | |||
|style="background:WhiteSmoke; color:black"| | |||
down to 0.067 µm | |||
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|style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Resolution z | |||
|style="background:WhiteSmoke; color:black"| | |||
1Å, 10Å or 20Å | |||
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|style="background:silver; color:black"|.||style="background:LightGrey; color:black"|Max. scan depth as a function of trench width W | |||
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1.2(W[µm]-5µm) | |||
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!style="background:silver; color:black" align="left"|Hardware settings | |||
|style="background:LightGrey; color:black"|Tip radius | |||
|style="background:WhiteSmoke; color:black"| | |||
*5 µm 45<sup>o</sup> cone | |||
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!style="background:silver; color:black" align="left"|Substrates | |||
|style="background:LightGrey; color:black"|Substrate size | |||
|style="background:WhiteSmoke; color:black"| | |||
*up to 8" | |||
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|style="background:silver; color:black"|.|| style="background:LightGrey; color:black"|Substrate material allowed | |||
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*In principle all materials | |||
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