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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,565 edits
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|ItemName= List of approved recipes
|ItemName= List of approved recipes
|ItemConfiguration= The list of currently approved recipes is:
|ItemConfiguration= The list of currently approved recipes is:
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/barcetchgentle | A barc etch gentle ]]
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/barcetchgentle | A gentle barc etch ]]
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/barcetchstrip | A barc etch strip ]]
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/OREt1| The ORE t1 resist mask]]
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ResistBarcStrip | Strip resist and barc ]]
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/polySiHardmask | A polysilicon etch for hard masks]]
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Cretch | Cr etch ]]
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Cretch | Cr etch ]]
 
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Nanoscale silicon etching with SF6 and O2| The CORE Si etch with Cr hard mask ]]
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Nanoscale silicon etching with SF6 and O2| The CORE process that has now been renamed to ORE t1 ]]
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/polySietchhardmask | A polySi etch hard mask ]]
 
 
 
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|ItemComment=  
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