Specific Process Knowledge/Etch/DRIE-Pegasus/nanobosch/nb-1.0: Difference between revisions
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<!-- Ok, jmli 20170627 --> | <!-- Ok, jmli 20170627 --> | ||
<!--Checked for updates on 24/8-2021. ok/ jmli--> | <!--Checked for updates on 24/8-2021. ok/ jmli--> | ||
<!--Checked for updates on 4/4-2025 - ok/jmli --> | |||
== Trial runs on HTF stepper wafers 22/6-2012 == | == Trial runs on HTF stepper wafers 22/6-2012 == | ||