Specific Process Knowledge/Thin film deposition/thermalevaporator: Difference between revisions
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!style="background:silver; color:black" align="left" valign="top" rowspan="4"|Performance | !style="background:silver; color:black" align="left" valign="top" rowspan="4"|Performance | ||
|style="background:LightGrey; color:black"|Film thickness||style="background:WhiteSmoke; color:black"| | |style="background:LightGrey; color:black"|Film thickness||style="background:WhiteSmoke; color:black"| | ||
*10Å - 1µm | *10Å - 1µm (Al and Ag) | ||
*up to 80 nm (Cr) | |||
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|style="background:LightGrey; color:black"|Deposition rate | |style="background:LightGrey; color:black"|Deposition rate | ||