Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
| Line 47: | Line 47: | ||
|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!'''Max. scan range xy''' | !'''Max. scan range xy''' | ||
|Line scan x: 1 µm to 200mm | |Line scan x: 1 µm to 200mm. | ||
Map scan xy: up to the largest square that can be inscribed in an 8" wafer | |||
|Line scan x: 50µm to 55mm in one scan. Maximum scan length with stitching 200mm. | |Line scan x: 50µm to 55mm in one scan. Maximum scan length with stitching 200mm. | ||
|Depending on the objective: | |Depending on the objective: | ||