Specific Process Knowledge/Cleanroom Chemicals: Difference between revisions
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*AZ 351B (NaOH based with disodium tetraborate buffer). Stored in E-4. | *AZ 351B (NaOH based with disodium tetraborate buffer). Stored in E-4. | ||
*AZ 726 MIF (TMAH based with surfactants added for fast and homogeneous substrate wetting). Stored in E-4. | *AZ 726 MIF (TMAH based with surfactants added for fast and homogeneous substrate wetting). Stored in E-4. | ||
*mr-Dev 600 (PGMEA). Stored in Bx1. | *mr-Dev 600 (PGMEA). Stored in Bx1. Or E-4? | ||
*ZED-N50 (n-Amylacetate). Stored in E-4. | *ZED-N50 (n-Amylacetate). Stored in E-4. | ||