Specific Process Knowledge/Cleanroom Chemicals: Difference between revisions
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THIS PAGE IS UNDER CONSTRUCTION
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=Missing from list?= | =Missing from list?= | ||
* | *APS-100? | ||
*AZ 400K (KOH based with Potassium borate buffer)? | |||
*Ethyl Acetate? | *Ethyl Acetate? | ||
*HSQ? | *HSQ? | ||
*Rinse T1100 (Mixture of Mesitylin, 1,2,4-Trimethylbenzene)? | |||
*UVN2300? | *UVN2300? | ||
Revision as of 10:57, 22 December 2020
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THIS PAGE IS UNDER CONSTRUCTION![Under construction.png](/images/thumb/f/f8/Under_construction.png/200px-Under_construction.png.jpeg)
This page lists the chemicals that are made available in the cleanroom by Nanolab, covered by the cleanroom access hourly rate.
Acids, bases, and etchants
- Ammonia solution 28%. Stored in D-3?
- Ammonium persulphate (Powder). Stored in D-3.
- BHF (Mixture of Ammonium fluoride, Ammonium bi fluoride, Hydroflouric acid). Stored in D-3.
- BOE 7:1 without surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid). Stored in D-3.
- BOE 7:1 with surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid). Stored in D-3.
- Boric acid. Stored in D-3?
- Chrome ETCH 18 (Mixture of Ceric ammonium nitrate, Perchloric acid, Nitric acid). Stored in Bx1.
- HF 5%. Stored in D-3?
- HF 40%. Stored in D-3?
- Hydrochloric acid 37%. Stored in D-3.
- Hydrogen peroxide 31%. Stored in D-3.
- Nitric acid 69%. Stored in D-3.
- Phosphoric acid 85%. Stored in D-3.
- Potassium hydroxide (Pellets). Stored in D-3.
- Potassium hydroxide 50%. Stored in D-3.
- Sulfamic acid. Stored in D-3?
- Sulfuric acid 96%. Stored in D-3.
Developers
- AR 600-546 (Amyl acetate). Stored in E-4?
- AZ 351B (NaOH based with disodium tetraborate buffer). Stored in E-4.
- AZ 726 MIF (TMAH based with surfactants added for fast and homogeneous substrate wetting). Stored in E-4.
- mr-Dev 600 (PGMEA). Stored in Bx1.
- ZED-N50 (n-Amylacetate). Stored in E-4.
Resists
- AR-P 6200.09. Stored in E-4.
- AZ 4562. Stored in E-4, small bottle in E-5.
- AZ 5214E. Stored in E-4, small bottle in E-5.
- AZ nLOF 2020. Stored in E-4, small bottle in E-5.
- AZ MiR 701 (29cps). Stored in E-4, small bottle in E-5.
- DUV42S-6 (BARC for stepper). Stored in E-4.
- KRF M230Y 6cp. Stored in E-4.
- KRF M35G 27cp. Stored in E-4.
- SU-8 2005. Stored in C-1.
- SU-8 2035. Stored in C-1.
- SU-8 2075. Stored in C-1.
Solvents
- 2-Propanol "IPA". Stored in C-1, D-3, E-4.
- Acetone. Stored in C-1, D-3, E-4.
- Anisole. Stored in E-4.
- AR 600-71 (Mixture of Dioxolane, PGME). Stored in E-4.
- A-Thinner (Anisole). Stored in E-4.
- Ethanol. Stored in C-1, D-3, E-4.
- MIBK. Stored in E-4.
- PGMEA (available as mr-Dev 600). Stored in Bx1.
- Remover 1165 (NMP). Stored in D-3, E-4.
Other chemicals
- HMDS. Stored in E-4.
Missing from list?
- APS-100?
- AZ 400K (KOH based with Potassium borate buffer)?
- Ethyl Acetate?
- HSQ?
- Rinse T1100 (Mixture of Mesitylin, 1,2,4-Trimethylbenzene)?
- UVN2300?