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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Line 642: Line 642:
|PGMEA/Ethyl Lactate
|PGMEA/Ethyl Lactate
|Acetone
|Acetone
|AZ 5214E, AZ 4562, AZ MiR 701, AZ nLOF 2000 series, mr-I8100R?
|AZ 5214E, AZ 4562, AZ MiR 701, AZ nLOF 2000 series,  
mr-I8100R?
|Two sets available
|Two sets available
|-
|-
Line 651: Line 652:
|Anisole
|Anisole
|Remover 1165
|Remover 1165
|AR-P 6200 series (CSAR 62), ZEP520A, mr EBL 6000, PMMA (in anisole), (LOR?, UV5?, mr-T85L?,
|AR-P 6200 series (CSAR 62), ZEP520A, mr EBL 6000, PMMA (in anisole),  
XNIL26?, mri8000?, mr-I 7010E?, mr-XNIL26_SF?, mrNIL210?)
LOR?, UV5?, mr-T85L?, XNIL26?, mri8000?, mr-I 7010E?, mr-XNIL26_SF?, mrNIL210?
|
|
|-
|-
Line 670: Line 671:
|Propyl Acetate
|Propyl Acetate
|Acetone
|Acetone
|OrmoComp, OrmoStamp, OrmoPrime, OrmoClad? (Inkron?, mr-I-7030R?, mr-I 8020E?, mr-I-7010E?, mrNIL210?, mr-I 8500E?, mr-T85?, MRT HI01XP?, Protek B3?, mrUVCur21?, mr-I 8100E_XP?, mrNIL210?,
|OrmoComp, OrmoStamp, OrmoPrime, OrmoClad?  
MRT HI01XP?, mr-NIL 6000.3E?, mr-I 8100R_XP?)
Inkron?, mr-I-7030R?, mr-I 8020E?, mr-I-7010E?, mrNIL210?, mr-I 8500E?, mr-T85?, MRT HI01XP?, Protek B3?, mrUVCur21?, mr-I 8100E_XP?, mrNIL210?, MRT HI01XP?, mr-NIL 6000.3E?, mr-I 8100R_XP?
|
|
|-
|-
Line 689: Line 690:
|Cyclopentanone/PGMEA
|Cyclopentanone/PGMEA
|Acetone
|Acetone
|SU-8 2000 series, mr-DWL, (mr-i 8030e?, mr-NIL200?, DELO-PRE/OM4310?, OrmoStamp?, Inkron?, mr-I 8020E?, OM4310?)
|SU-8 2000 series, mr-DWL,
mr-i 8030e?, mr-NIL200?, DELO-PRE/OM4310?, OrmoStamp?, Inkron?, mr-I 8020E?, OM4310?)
|
|
|-
|-
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