Specific Process Knowledge/Lithography/Coaters: Difference between revisions
| Line 642: | Line 642: | ||
|PGMEA/Ethyl Lactate | |PGMEA/Ethyl Lactate | ||
|Acetone | |Acetone | ||
|AZ 5214E, AZ 4562, AZ MiR 701, AZ nLOF 2000 series | |AZ 5214E, AZ 4562, AZ MiR 701, AZ nLOF 2000 series, mr-I8100R? | ||
|Two sets available | |Two sets available | ||
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|Anisole | |Anisole | ||
|Remover 1165 | |Remover 1165 | ||
|AR-P 6200 series (CSAR 62), ZEP520A, mr EBL 6000, PMMA (in anisole) | |AR-P 6200 series (CSAR 62), ZEP520A, mr EBL 6000, PMMA (in anisole), (LOR?, UV5?, mr-T85L?, | ||
XNIL26?, mri8000?, mr-I 7010E?, mr-XNIL26_SF?, mrNIL210?) | |||
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|Propyl Acetate | |Propyl Acetate | ||
|Acetone | |Acetone | ||
| | |OrmoComp, OrmoStamp, OrmoPrime, OrmoClad? (Inkron?, mr-I-7030R?, mr-I 8020E?, mr-I-7010E?, mrNIL210?, mr-I 8500E?, mr-T85?, MRT HI01XP?, Protek B3?, mrUVCur21?, mr-I 8100E_XP?, mrNIL210?, | ||
MRT HI01XP?, mr-NIL 6000.3E?, mr-I 8100R_XP?) | |||
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|Mesitylene | |Mesitylene | ||
|T1100 | |T1100 | ||
| | |3022-X, 4022-X | ||
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|Cyclopentanone/PGMEA | |Cyclopentanone/PGMEA | ||
|Acetone | |Acetone | ||
|SU-8 2000 series, mr-DWL | |SU-8 2000 series, mr-DWL, (mr-i 8030e?, mr-NIL200?, DELO-PRE/OM4310?, OrmoStamp?, Inkron?, mr-I 8020E?, OM4310?) | ||
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|PGME/PGMEA | |PGME/PGMEA | ||
|Acetone | |Acetone | ||
| | |AR-N 7500 series | ||
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|- | |- | ||