Specific Process Knowledge/Cleanroom Chemicals: Difference between revisions
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=Developers= | =Developers= | ||
*AR 600-546 (Amyl acetate) | *AR 600-546 (Amyl acetate) | ||
*AZ 351B (NaOH based with | *AZ 351B (NaOH based with disodium tetraborate buffer) | ||
*AZ 726 MIF (TMAH based) | *AZ 726 MIF (TMAH based) | ||
*mr-Dev 600 (PGMEA) | *mr-Dev 600 (PGMEA) | ||