Specific Process Knowledge/Cleanroom Chemicals: Difference between revisions
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'''THIS PAGE IS UNDER CONSTRUCTION''' [[Image:section under construction.jpg|70px]] | '''THIS PAGE IS UNDER CONSTRUCTION''' [[Image:section under construction.jpg|70px]] | ||
=Acids and | =Acids, bases, and etchants= | ||
*Ammonia solution 28% | |||
*Ammonium persulphate (Powder) | |||
*BHF (Mixture of Ammonium fluoride, Ammonium bi fluoride, Hydroflouric acid) | *BHF (Mixture of Ammonium fluoride, Ammonium bi fluoride, Hydroflouric acid) | ||
*BOE 7:1 without surfactant (Mixture of Ammonium fluoride, | *BOE 7:1 without surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid) | ||
*BOE 7:1 with surfactant (Mixture of Ammonium fluoride, | *BOE 7:1 with surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid) | ||
*Boric acid | |||
*Chrome ETCH 18 (Mixture of Ceric ammonium nitrate, Perchloric acid, Nitric acid) | |||
*HF 5% | *HF 5% | ||
*HF 40% | *HF 40% | ||
*Hydrochloric acid 37% | |||
*Hydrogen peroxide 31% | |||
*Nitric acid 69% | *Nitric acid 69% | ||
*Phosphoric acid 85% | |||
*Potassium hydroxide (Pellets) | |||
*Potassium hydroxide 50% | |||
*Sulfamic acid | |||
*Sulfuric acid 96% | |||
=Developers= | =Developers= | ||
AR 600-546 (Amyl acetate) | *AR 600-546 (Amyl acetate) | ||
AZ 351B (NaOH based) | *AZ 351B (NaOH based) | ||
AZ 726 MIF (TMAH based) | *AZ 726 MIF (TMAH based) | ||
ZED-N50 (n-Amylacetate) | *mr-Dev 600 (PGMEA) | ||
*ZED-N50 (n-Amylacetate) | |||
=Resists= | =Resists= | ||
*AR-P 6200.09 | *AR-P 6200.09 | ||
*AZ 4562 | |||
*AZ 5214E | |||
*AZ MiR 701 (29cps) | |||
*DUV42S-6 (BARC for stepper) | *DUV42S-6 (BARC for stepper) | ||
*KRF M230Y 6cp | |||
*KRF M35G 27cp | |||
*SU-8 2005 | *SU-8 2005 | ||
*SU-8 2035 | *SU-8 2035 | ||
| Line 25: | Line 40: | ||
=Solvents= | =Solvents= | ||
* | *2-Propanol "IPA" | ||
*Acetone | *Acetone | ||
*Anisole | *Anisole | ||
| Line 31: | Line 46: | ||
*A-Thinner (Anisole) | *A-Thinner (Anisole) | ||
*Ethanol | *Ethanol | ||
*MIBK | *MIBK | ||
*PGMEA | *PGMEA (available as mr-Dev 600) | ||
*Remover 1165 (NMP) | |||
=Other chemicals= | =Other chemicals= | ||
*HMDS | *HMDS | ||
Revision as of 15:03, 21 December 2020
THIS PAGE IS UNDER CONSTRUCTION 
Acids, bases, and etchants
- Ammonia solution 28%
- Ammonium persulphate (Powder)
- BHF (Mixture of Ammonium fluoride, Ammonium bi fluoride, Hydroflouric acid)
- BOE 7:1 without surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid)
- BOE 7:1 with surfactant (Mixture of Ammonium fluoride, Ammonium bifluoride, Hydroflouric acid)
- Boric acid
- Chrome ETCH 18 (Mixture of Ceric ammonium nitrate, Perchloric acid, Nitric acid)
- HF 5%
- HF 40%
- Hydrochloric acid 37%
- Hydrogen peroxide 31%
- Nitric acid 69%
- Phosphoric acid 85%
- Potassium hydroxide (Pellets)
- Potassium hydroxide 50%
- Sulfamic acid
- Sulfuric acid 96%
Developers
- AR 600-546 (Amyl acetate)
- AZ 351B (NaOH based)
- AZ 726 MIF (TMAH based)
- mr-Dev 600 (PGMEA)
- ZED-N50 (n-Amylacetate)
Resists
- AR-P 6200.09
- AZ 4562
- AZ 5214E
- AZ MiR 701 (29cps)
- DUV42S-6 (BARC for stepper)
- KRF M230Y 6cp
- KRF M35G 27cp
- SU-8 2005
- SU-8 2035
- SU-8 2075
Solvents
- 2-Propanol "IPA"
- Acetone
- Anisole
- AR 600-71 (Mixture of Dioxolane, PGME)
- A-Thinner (Anisole)
- Ethanol
- MIBK
- PGMEA (available as mr-Dev 600)
- Remover 1165 (NMP)
Other chemicals
- HMDS