Specific Process Knowledge/Cleanroom Chemicals: Difference between revisions
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=Acids and bases= | =Acids and bases= | ||
*BHF (Mixture of Ammonium fluoride, Ammonium bi fluoride, Hydroflouric acid) | |||
*BOE 7:1 without surfactant (Mixture of Ammonium fluoride, Ammoniumbi fluoride, Hydroflouric acid) | |||
*BOE 7:1 with surfactant (Mixture of Ammonium fluoride, Ammoniumbi fluoride, Hydroflouric acid) | |||
*HF 5% | |||
*HF 40% | |||
*Nitric acid 69% | |||
=Developers= | =Developers= | ||
AR 600-546 (Amyl acetate) | |||
AZ 351B (NaOH based) | |||
AZ 726 MIF (TMAH based) | |||
ZED-N50 (n-Amylacetate) | |||
=Etchants= | =Etchants= | ||
=Resists= | =Resists= | ||
*AR-P 6200.09 | |||
*DUV42S-6 (BARC for stepper) | |||
*SU-8 2005 | |||
*SU-8 2035 | |||
*SU-8 2075 | |||
=Solvents= | =Solvents= | ||
*1165 | *1165 | ||
*Acetone | *Acetone | ||
*Anisole | |||
*AR 600-71 (Dioxolane | *AR 600-71 (Mixture of Dioxolane, PGME) | ||
*A-Thinner (Anisole) | |||
*Ethanol | *Ethanol | ||
*IPA | *IPA | ||
*MIBK | |||
*PGMEA | |||
* | =Other chemicals= | ||
*HMDS | |||