Specific Process Knowledge/Cleanroom Chemicals: Difference between revisions
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=Acids and bases= | =Acids and bases= | ||
*BHF (Mixture of Ammonium fluoride, Ammonium bi fluoride, Hydroflouric acid) | |||
*BOE 7:1 without surfactant (Mixture of Ammonium fluoride, Ammoniumbi fluoride, Hydroflouric acid) | |||
*BOE 7:1 with surfactant (Mixture of Ammonium fluoride, Ammoniumbi fluoride, Hydroflouric acid) | |||
*HF 5% | |||
*HF 40% | |||
*Nitric acid 69% | |||
=Developers= | =Developers= | ||
AR 600-546 (Amyl acetate) | |||
AZ 351B (NaOH based) | |||
AZ 726 MIF (TMAH based) | |||
ZED-N50 (n-Amylacetate) | |||
=Etchants= | =Etchants= | ||
=Resists= | =Resists= | ||
*AR-P 6200.09 | |||
*DUV42S-6 (BARC for stepper) | |||
*SU-8 2005 | |||
*SU-8 2035 | |||
*SU-8 2075 | |||
=Solvents= | =Solvents= | ||
*1165 | *1165 | ||
*Acetone | *Acetone | ||
*Anisole | |||
*AR 600-71 (Dioxolane | *AR 600-71 (Mixture of Dioxolane, PGME) | ||
*A-Thinner (Anisole) | |||
*Ethanol | *Ethanol | ||
*IPA | *IPA | ||
*MIBK | |||
*PGMEA | |||
* | =Other chemicals= | ||
*HMDS | |||
Revision as of 13:19, 21 December 2020
THIS PAGE IS UNDER CONSTRUCTION 
Acids and bases
- BHF (Mixture of Ammonium fluoride, Ammonium bi fluoride, Hydroflouric acid)
- BOE 7:1 without surfactant (Mixture of Ammonium fluoride, Ammoniumbi fluoride, Hydroflouric acid)
- BOE 7:1 with surfactant (Mixture of Ammonium fluoride, Ammoniumbi fluoride, Hydroflouric acid)
- HF 5%
- HF 40%
- Nitric acid 69%
Developers
AR 600-546 (Amyl acetate) AZ 351B (NaOH based) AZ 726 MIF (TMAH based) ZED-N50 (n-Amylacetate)
Etchants
Resists
- AR-P 6200.09
- DUV42S-6 (BARC for stepper)
- SU-8 2005
- SU-8 2035
- SU-8 2075
Solvents
- 1165
- Acetone
- Anisole
- AR 600-71 (Mixture of Dioxolane, PGME)
- A-Thinner (Anisole)
- Ethanol
- IPA
- MIBK
- PGMEA
Other chemicals
- HMDS