Specific Process Knowledge/Cleanroom Chemicals: Difference between revisions
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=Solvents= | =Solvents= | ||
*1165 | |||
*Acetone | |||
*AR 600-71 (Dioxolane/PGME) | |||
*Ethanol | |||
*IPA | |||
*PGMEA | |||
Revision as of 13:07, 21 December 2020
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Acids and bases
Developers
Etchants
Resists
Solvents
- 1165
- Acetone
- AR 600-71 (Dioxolane/PGME)
- Ethanol
- IPA
- PGMEA