Specific Process Knowledge/Lithography/Coaters: Difference between revisions

@@ Line 623: / Line 623: @@
 '''Available bowlsets:'''
+{|border="1" cellspacing="1" cellpadding="7" style="text-align:center;"
+|-
-*'''AZ 5214E, AZ MiR 701, AZ nLOF 2020'''
+|-
-**Component solvent: PGMEA. Cleaning solvent: Acetone.
+|-style="background:silver; color:black"
+|
+!Component solvent
+!Cleaning solvent
+!List of resists
+!Comments
+|-
-*
+|-
+|-style="background:WhiteSmoke; color:black"
+!AZ 5214E, AZ MiR 701, Az nLOF 2020
+|PGMEA
+|Acetone
+|
+* AZ 5214E
+* AZ 4562
+* AZ MiR 701
+* AZ nLOF 2000 series
+|
+|-
+|-
+|-style="background:LightGrey; color:black"
+!CSAR, ZEP520A, mr EBL 6000
+|Anisole
+|Remover 1165
+|
+* AR-P 6200 series (CSAR 62)
+* ZEP520A
+* mr EBL 6000
+|
+|-
+|}
+<br clear="all" />
 === Equipment performance and process related parameters ===