Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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If you want to get access to the tool, then talk to professor Henri Jansen and the dry etch group. | If you want to get access to the tool, then talk to professor Henri Jansen and the dry etch group. | ||
[http://labadviser.nanolab.dtu.dk/images/d/d6/CORE1.pdf The CORE process] | |||
== Current setup and rules on Pegasus 2 == | == Current setup and rules on Pegasus 2 == | ||