Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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== Process information == | == Process information == | ||
New recipes are being developed all the time and the total number of recipes on the tool is huge. However, as the configuration of the instrument changes over time a vast majority of the recipes may no longer be safe to run. Unless you have specific permission to run other recipes, the only recipes that you can safely run are the ones in the 'std' folder. If you have your own recipe folder, always verify that the recipe you want to run is present in the 'std' folder. | |||
The recipes are: | |||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/barcetchgentle | barc etch gentle ]] | |||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/barcetchstrip | barc etch strip ]] | |||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Cretch | Cr etch ]] | |||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/OREt1 | ORE t1 ]] | |||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/polySietchhardmask | polySi etch hard mask ]] | |||