Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/TemperatureSettings: Difference between revisions
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==Correct settings for temperatures on Pegasus 2 == | ==Correct settings for temperatures on Pegasus 2 == | ||
The Platen chiller temperature is enabled and the setpoint is 20 degrees. This setting could be applied to all the heaters, however, the best way by far is to run the processes without enabling | The Platen chiller temperature is enabled and the setpoint is 20 degrees as seen in the image below. This setting could be applied to all the heaters, however, the best way by far is to run the processes without enabling the heaters as seen for the other heaters. | ||
[[file:Peg2tempsettings.jpg | 400px | frameless]] | [[file:Peg2tempsettings.jpg | 400px | frameless]] | ||
Revision as of 15:41, 15 December 2020
Feedback to this page: click here
Correct settings for temperatures on Pegasus 2
The Platen chiller temperature is enabled and the setpoint is 20 degrees as seen in the image below. This setting could be applied to all the heaters, however, the best way by far is to run the processes without enabling the heaters as seen for the other heaters.
