Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/TemperatureSettings: Difference between revisions
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==Correct settings for temperatures on Pegasus 2 == | |||
The Platen chiller temperature is enabled and the setpoint is 20 degrees. This setting could be applied to all the | |||
[[file:Peg2tempsettings.jpg | 400px | frameless]] | [[file:Peg2tempsettings.jpg | 400px | frameless]] |