Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/TemperatureSettings: Difference between revisions

From LabAdviser
Jmli (talk | contribs)
Created page with " 400px | frameless"
 
Jmli (talk | contribs)
No edit summary
Line 1: Line 1:
==Correct settings for temperatures on Pegasus 2 ==


 
The Platen chiller temperature is enabled and the setpoint is 20 degrees. This setting could be applied to all the
[[file:Peg2tempsettings.jpg | 400px | frameless]]
[[file:Peg2tempsettings.jpg | 400px | frameless]]

Revision as of 15:36, 15 December 2020

Correct settings for temperatures on Pegasus 2

The Platen chiller temperature is enabled and the setpoint is 20 degrees. This setting could be applied to all the