Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/TemperatureSettings: Difference between revisions

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==Correct settings for temperatures on Pegasus 2 ==


 
The Platen chiller temperature is enabled and the setpoint is 20 degrees. This setting could be applied to all the
[[file:Peg2tempsettings.jpg | 400px | frameless]]
[[file:Peg2tempsettings.jpg | 400px | frameless]]

Revision as of 15:36, 15 December 2020

Correct settings for temperatures on Pegasus 2

The Platen chiller temperature is enabled and the setpoint is 20 degrees. This setting could be applied to all the

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