Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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== Current setup and rules on Pegasus 2 == | == Current setup and rules on Pegasus 2 == | ||
Click [[Specific Process Knowledge/DRIE-Pegasus/Pegasus-2/OldConfig | '''here''']] to access older configurations. | Click [[Specific Process Knowledge/DRIE-Pegasus/Pegasus-2/OldConfig | '''here''']] to access older configurations. | ||
The current configuration is | The current configuration is | ||
{{Template:Peg2configheader1 | {{Template:Peg2configheader1 | ||
|TableHeader= Currently valid from November 2020 onwards | |TableHeader= Currently valid from November 2020 onwards | ||
}} | }} | ||
{{Template:Peg2configcontent1 | {{Template:Peg2configcontent1 | ||
|ItemName= Available gasses and gas chemistry | |ItemName= Available gasses and gas chemistry | ||
|ItemConfiguration= '''Available gasses:''' | |||
|ItemConfiguration= | |||
* SF<sub>6</sub>: 50 sccm | * SF<sub>6</sub>: 50 sccm | ||
* O<sub>2</sub>: 50 sccm | * O<sub>2</sub>: 50 sccm | ||
* Ar: 283 | * Ar: 283 | ||
* N<sub>2</sub>: 500 sccm | * N<sub>2</sub>: 500 sccm | ||
* He: 11 sccm | * He: 11 sccm | ||
'''Not available:''' | |||
* C<sub>4</sub>F<sub>8</sub> (H<sub>2</sub> currently fitted but closed) : 0 sccm | |||
* CO<sub>2</sub>: (It is not in the software) | * CO<sub>2</sub>: (It is not in the software) | ||
|ItemComment=OnlySF<sub>6</sub> and O<sub>2</sub> are used for Si, PR, and Cr etch. The rest is only make-up | |ItemComment=OnlySF<sub>6</sub> and O<sub>2</sub> are used for Si, PR, and Cr etch. The rest is only make-up | ||
}} | }} | ||