Specific Process Knowledge/Lithography: Difference between revisions
| Line 85: | Line 85: | ||
~50nm to 2µm | ~50nm to 2µm | ||
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~30nm to | ~30nm to 1 µm | ||
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~ 100nm to 2µm | ~ 100nm to 2µm | ||
| Line 85: | Line 85: | ||
~50nm to 2µm | ~50nm to 2µm | ||
| | | | ||
~30nm to | ~30nm to 1 µm | ||
| | | | ||
~ 100nm to 2µm | ~ 100nm to 2µm | ||